Auger Electron Spectroscopy Application: Product Quality and Safety

Analysts from Innovatech Labs performing auger electron spectroscopy testing.

To understand the composition of surfaces or interfaces of a particular product, manufacturers may rely on an analytical technique called Auger electron spectroscopy.

This information is important to product manufacturers as it tells the story behind product contaminations, stains and passivation layers. With this information, solutions to these problems become available. This ensures the quality of the product and upholds the safety of their customers.

To understand the overall Auger Electron Spectroscopy process and how it helps manufactured product production, before and after, please refer to the following:

Auger Electron Spectroscopy for Manufacturing

Auger Electron Spectroscopy (AES) is a surface analytical technique that provides information about surfaces and interfaces. This process is beneficial to manufacturers for analyzing contamination, stains and other operations.

Using AES, manufactures can determine the composition of a surface while mapping out the surface constitutes. The advantage of the Auger electron process is its high spatial resolution (<< micron).

Auger Electron Spectroscopy Service Details

The amount of time to perform a typical analysis is 0.5 hours per sample. This also depends on the depth profile and may take longer depending on the total depth.

Sample requirements are a maximum size of 3/4 x 1/2” and height should not exceed 1/2 ”. The auger electron sample requires compatibility with high vacuum environments (ca. 1 x 10-9 Torr).

There is a 10% relative error on repeated analyses and a 20% absolute error (error between analysis and known standard). For successful analysis, there is a minimum area to test – 0.3 microns.

Some of the unique capabilities of the Auger Electron Spectroscopy process include:

  • Measurement of elemental composition of small conductive areas
  • Particles
  • Inclusions
  • Semiconductor devices

Learn more about Innovatech’s Auger Electron Spectroscopy Testing Services.


Leave a Reply