Innovatech Labs, LLC
13805 First Ave. N. Suite 100
Plymouth, MN 55441
Phone (763) 231-0150
Fax (763) 231-0151
Toll free: (888) 740-5227
Auger Electron Spectroscopy(AES)
Auger electron spectroscopy (AES), also known as scanning Auger microscopy, is a surface analytical technique that provides information about surfaces and interfaces.
The principle advantage of Auger Electron Spectroscopy is its high spatial resolution (< 1 micron). AES can be used for determining the composition of a surface, mapping the spatial distribution of the surface constituents, and obtaining an in-depth profile of these constituents into the bulk of the material. AES uses an incident electron beam to excite a solid resulting in the emission of electrons known as Auger electrons. An energy analysis of these Auger electrons provides the analytical information for this technique.
Auger Electron Spectroscopy is an ideal tool for analyzing small features such as particles, small diameter wires, bonding pads, etc. It is an excellent technique for analyzing contamination, stains and passivation layers among other things on conductive or semi-conductive materials.
Read more about auger electron microscopy details and how it's unique capabilities can help.
Learn more about other materials analysis services available from Innovatech Labs.
• Determine atomic concentrations
of elements present on a surface
• Map the lateral distribution of
• Measure the distribution of
elements as a function of depth
Contact us for more information.