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Analysis of Haze on Polyimide Substrate by ESCA Testing (XPS)

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A haze was observed on a polyimide film produced by an electronics manufacturer. The manufacturer suspected the contaminant to be a chromium residue; more specifically, it was suspected that the chromium film was not completely etched away leaving an observable residue. Therefore, the haze was analyzed using Electron Spectroscopy for Chemical Analysis (ESCA). ESCA testing is an excellent technique for analyzing thin films(<100 angstroms) on insulating substrates. The ESCA testing survey scan of the hazed area is shown in the figures below. The survey scan shows the presence of chromium in the hazed area indicating that the chromium film was not completely removed.

 

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Results of ESCA testing reveal presence of chromium.