Details of Auger Electron Microscopy

Materials Analysis - Cleanliness Testing Lab

Innovatech Labs, Inc.
13805 First Ave. North
Suite 100
Plymouth, MN 55441

Phone (763) 231-0150
Fax (763) 231-0151
Toll free: (888) 740-5227

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ANALYTICAL INFORMATION:

Survey scan - identifies the elemental composition of the analyzed surface.

Multiplex scan - measures the atomic concentration of the elements identified in the survey scans. Detection limits are approximately 0.1 atom percent for most elements.

Mapping - measures the lateral distribution of elements on the surface. Spatial resolution is approximately 0.3 microns.

Depth profile - measures the distribution of elements as a function of depth into the sample. Depth resolution is dependent upon sample and sputtering parameters (less than 100 Å resolution is not unusual). Typical sputtering rate is ca. 30 Å/min.

SAMPLE REQUIREMENTS:

Sample size - Maximum of ¾"x½" (18 mm x 12 mm). Height should not exceed ½" (12 mm).

Sample type - must be conductive or area of interest must be grounded properly. Insulating samples including thick insulating films (ca. 3000 Å) cannot be analyzed.

Sample compatibility - must be compatible with high vacuum environment (ca. 1x10-9 Torr).

SUPPLEMENTAL INFORMATION:

Typical analysis time - ½ hr per sample .Depth profiles may take longer depending on the total depth being sputtered.

Reproducibility - 10% relative error (i.e. estimated error in repeated analyses), 20% absolute error (i.e. error between analysis and known standard).

Minimum area of analysis - 0.3 microns.

Unique Capabilities:

measuring elemental composition of small conductive areas
particles
inclusions
semiconductor devices

"Great turn around time and excellent responsiveness." - Engineer at Precision Components Manufacturer

"Pleasure to work with all that I have contacted" - Scientist for Packaging Company

"Nice lab report. Discussion with [the analyst] showed a good understanding of the technique." - Senior Analytical Chemist at Adhesive Manufacturer

"Very complete technical report. We received exactly the information we needed for this project. -

Engineer at Manufacturer of Data Collection Equipment

"[The analyst] was extremely helpful and knowledgeable" - Engineer at a Precision Components Manufacturer

Innovatech Labs is an analytical laboratory specializing in materials analysis for manufacturing, quality control, failure analysis, and research & development.

We offer a broad range of cleanliness testing, surface analytical techniques, organic spectroscopies, bulk testing methods, and consulting services.
Contact us for more information.

Innovatech Labs offers a broad range of cleanliness testing, surface analytical techniques, organic spectroscopies, bulk testing methods, and consulting services. Contact us for more information.