InnovaTECH - Materials Analysis Cleanliness Testing
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Details for Electron Spectroscopy for Chemical Analysis (ESCA)


Survey scan - identifies the elemental composition of the analyzed surface.

High resolution multiplex scan - measures the atomic concentrations of the elements identified in the survey scan (H and He cannot be detected). Detection limits are approximately 0.1 atom percent for most elements. Also measures the chemical environment of each element through its binding energies. Precise determination of binding energies are made through the use of curve-fitting routines. A NIST database is available for identifying binding energies with actual compounds.

Depth profile - measures the distribution of elements as a function of depth into the sample. Depth resolution is dependent upon sample and sputtering parameters (ca. 100 Å resolution is not unusual). Typical sputtering rate is 30 Å/min.


Sample size - cannot exceed 1" (25 mm) in any lateral direction. Height should not exceed ½" (12 mm).

Sample compatibility - must be compatible with high vacuum environment (ca. 1x10-9 Torr).


Typical analysis time - ½ hr per sample.

Depth profiles may take longer depending on the total depth being sputtered.

Reproducibility - 10% relative error (i.e. estimated error in repeated analyses), 20% absolute error (i.e. error between analysis and known standard).

Minimum area of analysis - 200 mm.

Angular resolved measurements are available with take off angles from 10º to 80º.

Standard and monochromatic x-ray sources are available.