Auger Electron Spectroscopy

Auger electron spectroscopy (AES, also known as scanning Auger microscopy) is a surface analytical technique which provides information about surfaces and interfaces.

The principle advantage of AES is its high spatial resolution (ca. 1 micron). AES can be used for determining the composition of a surface, mapping the spatial distribution of the surface constituents, and obtaining an in-depth profile of these constituents into the bulk of the material. Auger uses an incident electron beam to excite a solid resulting in the emission of electrons known as Auger electrons. An energy analysis of these Auger electrons provides the analytical information for this technique.

Auger is an ideal tool for analyzing small features such as particles, small diameter wires, bonding pads, etc.  It is an excellent technique for analyzing contamination, stains and passivation layers among other things. 

Details of Auger Electron Microscopy