Details of Auger Electron Microscopy

ANALYTICAL INFORMATION:

Survey scan - identifies the elemental composition of the analyzed surface.

Multiplex scan - measures the atomic concentration of the elements identified in the survey scans. Detection limits are approximately 0.1 atom percent for most elements.

Mapping - measures the lateral distribution of elements on the surface. Spatial resolution is approximately 0.3 microns.

Depth profile - measures the distribution of elements as a function of depth into the sample. Depth resolution is dependent upon sample and sputtering parameters (less than 100 Å resolution is not unusual). Typical sputtering rate is ca. 30 Å/min.

SAMPLE REQUIREMENTS:

Sample size - Maximum of ¾"x½" (18 mm x 12 mm). Height should not exceed ½" (12 mm).

Sample type - must be conductive or area of interest must be grounded properly. Insulating samples including thick insulating films (ca. 3000 Å) cannot be analyzed.

Sample compatibility - must be compatible with high vacuum environment (ca. 1x10-9 Torr).

SUPPLEMENTAL INFORMATION:

Typical analysis time - ½ hr per sample .Depth profiles may take longer depending on the total depth being sputtered.

Reproducibility - 10% relative error (i.e. estimated error in repeated analyses), 20% absolute error (i.e. error between analysis and known standard).

Minimum area of analysis - 0.3 microns.

Unique Capabilities:

• measuring elemental composition of small conductive areas
• particles
• inclusions
• semiconductor devices