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Auger Electron Microscopy Details

At Innovatech Labs, we offer our customers auger electron microscopy materials testing. Read more below for additional information and discover what makes our laboratory services unique.


Survey scan - identifies the elemental composition of the analyzed surface.

Multiplex scan - measures the atomic concentration of the elements identified in the survey scans. Detection limits are approximately 0.1 atom percent for most elements.

Mapping - measures the lateral distribution of elements on the surface. Spatial resolution is approximately 0.3 microns.

Depth profile - measures the distribution of elements as a function of depth into the sample. Depth resolution is dependent upon sample and sputtering parameters (less than 100 Å resolution is not unusual). Typical sputtering rate is ca. 30 Å/min.


Sample size - Maximum of ¾"x½" (18 mm x 12 mm). Height should not exceed ½" (12 mm).

Sample type - must be conductive or area of interest must be grounded properly. Insulating samples including thick insulating films (ca. 3000 Å) cannot be analyzed.

Sample compatibility - must be compatible with high vacuum environment (ca. 1x10-9 Torr).


Typical analysis time - ½ hr per sample. Depth profiles may take longer depending on the total depth being sputtered.

Reproducibility - 10% relative error (i.e. estimated error in repeated analyses), 20% absolute error (i.e. error between analysis and known standard).

Minimum area of analysis - 0.3 microns.

Unique Capabilities:

  • measuring elemental composition of small conductive areas
  • particles
  • inclusions
  • semiconductor devices

Contact our highly qualified analysts to learn more about auger electron spectroscopy and discuss your specific materials testing needs.